Study on highly efficient laser-plasma light source and its applications for microfabrication and textural control of materials

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Plasma expansions on micro-balloon lithium targets irradiated with coaxial double pulses and counter-streamed simultaneous two-pulses were observed by a time-resolved EUV camera. The counter-streamed pulses were confirmed to be more effective for uniform heating of the target. A soft X-ray conversion efficiency in a wavelength range of 5-17 nm in a cryogenic xenon rotating target was 25%/2πsr at the maximum. An attenuation coefficient of sputtering by the debris and an absorption coefficient of soft x-rays at 13.5 nm by argon gas were derived to be 2.2×10^<20> m^2 and 1.8×10^<-22> m^2, respectively. The attenuation coefficient of sputtering is concluded to be equivalent to the effective collision cross section. These parameters provide a useful design tool for realizing a practical soft x-ray source.