Establishment of a novel electron tomographic reconstruction method based on a newly found property of image fine dots which convergently move to definitive positions

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With an electron microscope nano-tomographic images(nano-order resolution) of various materials can be taken, in which the same principle as medical X-ray CT apparatuses is used. However, in general, because a specimen is put on a support thin film extended horizontally the tilt angle is limited to about 60deg.(90deg. ideal). Therefore, only distorted tomographic images are obtained. In this research work, a novel image reconstruction method was devised. This was applied to them and as a result successful images unaffected by the distortion artifact were obtained. Furthermore, it was achieved that the electron dose was reduced to about 20% as compared with the general case.