Structure optimization of a field emitter with a built-in micro electrostatic lens

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We proposed a field emitter with a built-in micro electrostatic lens, in which micron-sizsed field emitter and multi-stacked electrostatic lens are integrated on a silicon substrate, in order to achieve a tiny scanning electron microscope. We optimized and established the fabrication process by using ion irradiation technique, and so on. We also proposed new wehnelt electrode for obtaining strongly focused electron beam.