Self-assembly of fine particles using combination of dispenser and stage control

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Self-assembly of fine particles is one of the potential processes for nano-/microstructuring. It has versatility because it can be used as etching mask as well as functional devices. However, traditional dip-coating has limitation of both of substrate size and particle size. This study proposes a new process which utilizes a combination of dispenser and motored stage. Applying control of dispenser and stage, various particles were assembled on a substrate along arbitrary pattern without any mask. Then, fixation of the particles was discussed where the particles were transferred to another substrate using UV curing resin. In this process, the structure becomes upside-down and the top particles aligned at same height. Thus, an application to polishing tool was also discussed.