Micro actuators with displacement amplification mechanisms

对于使手指皮肤变形、刺激触觉感受器、传递触觉信息和控制大质量流量的微阀的触觉显示器，大位移微执行器的开发是强制性的。我们开发并表征了具有液压放大机构的大位移MEMS致动器，该致动器将不可压缩流体封装在输入和输出表面具有不同截面积的微腔中。

Development of large-displacement micro actuators is mandatory for tactile displays that deforms finger skins, stimulates tactile receptors, and deliver tactile information and micro valves controlling large mass flows. We have developed and characterized large-displacement MEMS actuators with hydraulic amplification mechanism that encapsulates incompressible fluid in a micro chamber whose input and output surfaces have different cross-sectional areas.