Development of novel mechano-luminesence thin film.

掺锰的硫化锌是一种很有前途的应力诱导发光材料。本工作研究了用沉积方法制备ZnS：Mn薄膜的可行性，并研究了薄膜的光致发光行为与薄膜的微观结构的关系。对硫化锌：锰粉进行了不同应力条件下的力学试验。环氧树脂包埋的硫化锌：锰粉混合物表现出光致发光(PL)和机械发光(ML)，且机械发光的大小随负载条件的增加而增大。对于离子束溅射沉积硫化锌薄膜，由于靶材料的离子性质的极化电荷，需要中和的离子束。在衬底和衬底之间加入中间的铜缓冲层，可以减少薄膜在沉积过程中和沉积后的剥离现象。X射线反射表明薄膜与衬底晶格失配引起的界面应力得到调节。然而，在IBS和电阻热沉积法沉积的薄膜中几乎没有观察到发光行为。这可能是由于在Ar气氛中随后的热处理提供了发光，因此在替代点阵点处，薄膜中的Mn含量不足。

Mn doped ZnS is promising for the stress induced light emitting material. The present work examined the feasibility of production of ZnS:Mn film by deposition methods, and the photoluminescence behaviors with related to the microstructure of deposited film. The mechanical tests under various stress conditions have been conducted for ZnS:Mn powder. The mixture of ZnS:Mn powder embedded in epoxy shows photo-luminescence (PL) and mechano-luminescence (ML), and the magnitude of ML is enhanced by the concentrated loading condition. Regarding to the ion beam sputtering deposition of ZnS film, neutralized ion beam is required because the polarization charge of ionic nature of target matetial. The clack and peeling of the film during and after deposition can be reduced by intermediate Cu buffer layer between ZnS and Si substrate. X-ray reflection implies the accommodation of interfacial stress caused by lattice mismatch between films and substrate. However, PL behavior is hardly observed in deposited films by IBS and also the resistive heat deposition method. This might be due to the contents of Mn inside the film is insufficient at the substitutional lattice points since subsequent heat treatment in Ar atmosphere provides PL.