Analysis of Nonequilibrium Radiation in Low-pressure Microwavedischarged Nitrogen Plasma using Near Infrared Spectroscopy

在560 ~ 1060nm波长范围内对低压微波放电氮等离子体进行了光谱测量。在该波长区，主要观察到Δv=0 ~ Δv=+4波段系列的N_2第一正（1+）波段。将实验谱与考虑卫星分支的理论谱进行比较，发现N_2 B态的实验振动居布分布形成非玻尔兹曼分布。利用N_2 B态主方程对等离子体的振动居群分布进行了数值分析，并对等离子体的振动不平衡进行了详细的研究。

Spectroscopic measurement of low-pressure microwave-discharged nitrogen plasma was conducted in the wavelength region of 560 to 1060nm. In this wavelength region, N_2 first positive (1+) bands of Δv=0 to Δv=+4 band series were observed predominantly. From the comparison of the experimental spectra and the theoretical spectra considering the satellite branches, it was found that the experimental vibrational population distribution on the N_2 B state formed the non-Boltzmann distribution. The analysis of the vibrational population distribution was also conducted numerically by a master equation for the N_2 B state, and the vibrational nonequilibrium of the plasma was investigated in detail.