Development of the segmented mirror control system usinga self-phase-measurement method

在本研究中，1）使用两个固定波长的激光器和一个可调谐激光器的自相位测量系统，测量精度为15nm的段之间，2）反射镜支撑系统保持段之间的相对轴向位置的精度为15nm，和3）模拟软件，18段控制与60个位置传感器，已经开发。实验结果表明，利用这些技术可以实现对18个分块反射镜的控制。

In this study, 1) a self-phase-measurement system using two fixed wavelength lasers and one tunable laser with the measurement accuracy of 15nm between segments, 2) mirror support systems holding the relative axial-position between segmentswith an accuracy of 15nm, and 3) simulation software for 18 segments control with 60 position sensors, has been developed. As a result, it is verified that we can control 18 segmented-mirrors using these techniques.