Polymer surface morphology control by reactive ion etching and its application

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n this study, we have developed the novel reactive ion etching (RIE) method to control polymer surface morphology in the wide range from smooth surface to grassy surface. It is found that the morphology is closely related to micromask concentration. Then, micro/nano array structure was formed on the polymer surface by using a combination of the RIE and colloidal lithography (CL) to prepare ordered particle monolayer as etching mask. Finally, a nanocone array structure on a PMMA was applied to protein chip, and the structure was effective for protein detection because of its large surface area.