Development of electron-impact ion source using RF electric field for enhancing ionization rate of thermal ionization mass spectrometer

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Development of electron-impact ion source using RF electric field has been conducted aiming at the enhancement of ionization rate of thermal ionization mass spectrometer. The RF (200-250 MHz) electric field was applied between the evaporation and ionization filament closely built in an ion source via one side of the filaments. Total amount of ions created from the ion source was detected by a Faraday cup, and then ions of individual elements were measured with a Q-mass spectrometer. It was clearly observed that the amount of ions was enhanced with the increase of the RF input power. The experimental results indicate that the RF electric field is effective to the enhancement of ionization rate of the thermal ionization mass spectrometry.