Profile Measurement System of Phase-Shifting Point Diffraction Interferometer with Spherical Reference Wavefronts Generated byTwo Optical Fibers

本文提出了一种用于大口径光学元件面形绝对测量的双光纤移相点衍射干涉仪（PS/PDI）。由于PS/PDI具有两个点光源位置的灵活性，因此它可以在不使用成像光学器件的情况下生成包含表面轮廓信息的条纹。利用数字全息术进行波前分析，可以精确地再现反射镜的面形。作为非球面反射镜的应用，本文研究了平面镜的面形测量。

A phase-shifting point diffraction interferometer (PS/PDI) withtwo optical fibers has been developed for absolute surface profile measurement of large aperture optics. Since the PS/PDI has flexibility of the positions for two point lightsources, it can generate the fringes included information for surface profile without use of imaging optics. Surface profile of a mirror can be reconstructed precisely conducting wavefront analyses by digital holography. As the application to aspheric mirror, profile measurement of a flat mirror has been studied.