Profile Measurement System of Phase-Shifting Point Diffraction Interferometer with Spherical Reference Wavefronts Generated byTwo Optical Fibers

双光纤球面参考波前移相点衍射干涉仪轮廓测量系统

• 批准号: 22560109
• 负责人: NAKANO Motohiro
• 金额: $ 3万
• 依托单位: Osaka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2012
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22560109/
• 关键词: 精密位置決め; 加工計測; PDI(Point Diffraction Interferometer); 位相シフト干渉計; 光ファイバ; 精密加工計測; PDI; Point Diffraction Interferometer; Point Diffraction Interierometer

A phase-shifting point diffraction interferometer (PS/PDI) withtwo optical fibers has been developed for absolute surface profile measurement of large aperture optics. Since the PS/PDI has flexibility of the positions for two point lightsources, it can generate the fringes included information for surface profile without use of imaging optics. Surface profile of a mirror can be reconstructed precisely conducting wavefront analyses by digital holography. As the application to aspheric mirror, profile measurement of a flat mirror has been studied.

研制了一种双光纤移相点衍射干涉仪（PS/PDI），用于测量大口径光学器件的绝对表面轮廓。由于PS/PDI具有两个点光源位置的灵活性，它可以在不使用成像光学器件的情况下生成表面轮廓的条纹包含信息。利用数字全息技术进行波前分析，可以精确地重建镜面的表面轮廓。作为非球面反射镜的应用，研究了平面反射镜的轮廓测量。

项目成果

量子計測領域ホームページ

量子测量领域主页