Study about 3D shape evalution method with zero Abbe error for micro parts

微型零件零阿贝误差3D形状评估方法研究

• 批准号: 22760091
• 负责人: EMO Sangin
• 金额: $ 2.75万
• 依托单位: Tokyo Institute of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Young Scientists (B)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2011
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22760091/
• 关键词: 精密位置決め; 加工計測; 座標測定器; 光ピンセット

A novel probing technique for nano-CMM(Coordinate Measuring Machine) is suggested. In this technique, a micro sphere is trapped optically at the tip of the tapered shape of a single optical fiber and used for a touch probe for the nano-CMM. In order to use the trapped micro sphere for the touch probe, intensity changes of the reentered light that is reflected from the surface of the micro sphere and object are used for the probe signal. When the probe is in contact with the surface of the object, the probe position is decentered from the tip of the optical fiber and the intensity of reentered light is changed and used for probe signals. In experiments, the intensity changes are detected by a power meter and applied to be used as the probe signal. Mechanisms of intensity changes are discussed briefly.

提出了一种新的纳米三坐标测量机测头技术。在该技术中，微球被光学地捕获在单根光纤的锥形形状的尖端处，并用于纳米CMM的接触探针。为了将捕获的微球用于接触探针，从微球和物体的表面反射的再进入光的强度变化被用于探针信号。当探头与物体的表面接触时，探头位置从光纤的尖端偏心，并且重新进入的光的强度被改变并用于探头信号。在实验中，通过功率计检测强度变化并将其用作探测信号。强度变化的机制进行了简要讨论。

项目成果

Study on the probe signal of single fiber optical trapping probe

单光纤陷波探头探测信号的研究

• 发表时间: 2010
• 作者: Sang In EOM;Yasuhiro TAKAYA;Terutake HAYASHI
• 通讯作者: Terutake HAYASHI