Fabrication of epitaxially grown functional oxide thin films on flexible polymer substrate.

本研究的目的是阐明在柔性聚合物衬底上制备外延功能氧化物，即压电、铁电等的基本知识和工艺过程。通常情况下，柔性聚合物由于耐热性差，无法抵抗数百摄氏度以上的温度。为了解决这一问题，提出了柔性外延氧化物薄膜的制备新工艺。首先，在耐热的镁衬底上外延生长高质量的氧化物薄膜。然后将样品粘在柔性聚合物基板上。最后，通过刻蚀工艺将Mg0衬底完全溶解。在本研究中，确立了该工艺的基本程序。

The purpose of the study is to clarify the fundamental knowledge and the process procedure for the fabrication of epitaxial functional oxides, i. e., piezoelectric, ferroelectric and so on, onto flexible polymer substrates. Generally, flexible polymer cannot resist the temperature of more than hundreds centigrade, due to the poor heatproof. In order to resolve the problem, the novel process for the flexible epitaxial oxide thin films was proposed. First, high quality oxide thin film is epitaxially grown on Mg0 substrate which is heatproof. Then the sample is glued to flexible polymer substrate. Finally, the Mg0 substrate is completely dissolved by etching process. In this study, basic procedure of the process was established.