Ultrasonic testing by multi-probe atomic force microscopy

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We demonstrated imaging of nanometer-scale subsurface features, Au nanoparticles buried in a polymer matrix. The particles were successfully visualized by scanning near-field ultrasound holography(SNFUH) and ultrasonic atomic force microscopy(UAFM), even if the depth of the particles from the surface was approximately 1 micrometer. It is suggested that the optimum cantilever depends on the elasticity of the polymer matrix. We also developed a dual-probe AFM system which can be operated in various environments for ultrasonic imaging of subsurface features.