Development of nano-probe with low noise actuation mechanism for nano-machining and in situ measurement

原子力显微镜（AFM）不仅是一种测量工具，而且在分子外科等分子科学领域也有望成为一种新型的纳米加工工具。为了实现高分辨率的纳米加工和原位分子成像，本研究重点开发了用于纳米加工和成像的窄间隙双AFM探针，每个悬臂上都有单独的纳米尖端。采用自对准刻蚀工艺制备了一种间距为500nm的双尖头。采用磁致伸缩膜（FePd合金）双悬臂梁作为低噪声执行器，利用外加磁场开关两个尖端。

Atmic force micrscopy (AFM) is expected not only as a mesurement tool but also as a novel nano-machining tool in molecular science field such as molecular surgery. In order to relize nano-machining and in-situ molecular imaging with high resolution, this research focused on the development of narrow-gapped dual AFM probe with individual nano-tips on each cantilever for nano-machining and imaging. Self-align etching process was developed to fabricate a sharp dual tip separated by 500 nm. A dual cantilever with magneto-strictive film (FePd alloy) was also developed as a low noise actuator for switching the two tips by external magnetic field.