Development of a differential air bearing screw

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A differential air bearing screw was newly developed that an accurate positioning having no solid friction, no backlash, and no hysteresis.1. It was clarified that the differential air bearing screw has 8 possible constitute of. A differential air screw that was made of an inner screw, a middle screw, and outer screw composition was designed and developed for both supplying and exhausting static air, air pressure restrictors and high air stiffness. 2. Low vibration and high stiffness surfacing were proposed using partial recesses on air nut and ceramic air nuts of 0.1 mm. The stiffness of the partial recess nuts was obtained for non-dimension stiffness 0.29. 3. The lead screw performance of the differential air screw was evaluated and both-way sending of small displacement operation 3.5 nm was clarified.