Development of a differential air bearing screw

新开发的差动空气轴承螺杆，定位准确，无固体摩擦，无间隙，无磨损。已澄清，差动空气轴承螺钉有8种可能的构成。设计并开发了一种由内、中、外三个螺杆组成的差动式空气螺杆，用于静态空气的供给和排出、空气压力限制器和高空气刚度。2.提出了在空气螺母和0.1 mm陶瓷空气螺母上使用局部凹槽进行低振动高刚度堆焊的方法，获得了局部凹槽螺母的无量纲刚度为0.29的刚度。3.对差动式空气螺杆的丝杠性能进行了评价，阐明了3.5 nm小位移操作的双向送料。

A differential air bearing screw was newly developed that an accurate positioning having no solid friction, no backlash, and no hysteresis.1. It was clarified that the differential air bearing screw has 8 possible constitute of. A differential air screw that was made of an inner screw, a middle screw, and outer screw composition was designed and developed for both supplying and exhausting static air, air pressure restrictors and high air stiffness. 2. Low vibration and high stiffness surfacing were proposed using partial recesses on air nut and ceramic air nuts of 0.1 mm. The stiffness of the partial recess nuts was obtained for non-dimension stiffness 0.29. 3. The lead screw performance of the differential air screw was evaluated and both-way sending of small displacement operation 3.5 nm was clarified.