A Study on Improved Specification of an Absolute Displacement Sensor

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An absolute displacement sensor has been proposed for anti-vibration. By using Grant-in-Aid for Scientific Research (C20560212), it has been shown that this sensor is effective as a feedback sensor. Then, we would like to apply the same sensor to semiconductor exposure apparatuses, however detection bandwidth and sensitivity were limited. To overcome these issues, a high sensitive method by increasing the number of coil turns was carried out. Next, sensitivity calibration and practical control tests were conducted. Finally, we conducted to suppress the resonances by Tuned Mass Damper. As a result, the resonances can be most suppressed by TMD. Moreover, we tried loading TMD in consideration of vibration modes, loading point, and constitution of TMD. The resonances were drastically suppressed by TMD on multiple points. In addition, we confirmed effects of high frequency dynamics and its suppression under the feedback of the absolute displacement sensor's velocity signal.