A Study on Anti-Vibration Control Using 5-Axes Magnetic Bearing for Structure

为了抑制机械结构的振动，常用的有调谐质量阻尼器、主动质量阻尼器和某种橡胶等。但减振效果有限，无法设计设定。为了克服这些情况，我们制定了利用涡轮分子泵抑制振动的方案。由于其泵由磁性轴承悬浮，因此根据振动信号利用强制激励容易产生反作用力。即我们打算同时实现真空和防震功能。在本研究中，利用磁悬浮转子的径向控制自由度，目的是证明可以同时抑制钢板的第一和第二弯曲模式。首先，根据转子的运动模式构建了反馈控制系统。连续地，前馈控制系统产生反作用力。然后，钢板受到蜂鸣机的冲击，因此，在无旋转的情况下，利用前馈信号抑制了一、二次弯曲振动。最后利用叶片泵实现转子在低真空环境下的驱动。在3000转/分的条件下，可以抑制钢板的第一次和第二次弯曲振动。从而成功地完成了本研究的目的。

To suppress the vibration of mechanical structures, the tuning mass dampers, active mass dampers, and some kind of rubbers etc. have been commonly used. However, anti-vibration effect is limited and cannot set designedly. To overcome these circumstances, we formulate a plan that the turbo molecular pump is utilized to suppress the vibration. Since its pump is suspended by the magnetic bearings, then the reaction forces are easily generated by using the forced excitation based on the vibration signals. Namely we intend to realize the vacuum and anti-vibration functions simultaneously. In this research, by utilizing the radial control freedom of magnetic suspended rotor the objective is to demonstrate that the first and second bending modes of steel plate can be simultaneously suppressed.Firstly, the feedback control system is constructed based on the motional mode of rotor. Continuously, the feedforward control system to generate the reaction forces is implemented. Next, the steel plate is impacted by the hummer As a result, 1st and 2nd bending vibrations are suppressed using the feedforward signals under the condition of none rotation. Finally, the rotor is driven under the low vacuum environment realized by using the vane pump. The steel plate vibrations with 1st and 2nd bending can be suppressed under the condition 3,000rpm. Then we accomplish this research purpose successfully.