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Elucidation of Removal Process of Oxide Layer using High Speed Spectroscopic Measurement

使用高速光谱测量阐明氧化层的去除过程

基本信息

批准号：
23560341
负责人：
IWAO TORU
金额：
$ 2.5万
依托单位：
Tokyo City University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2011
资助国家：
日本
起止时间：
2011 至 2013
项目状态：
已结题

项目摘要

The removal process of oxide layer in the vacuum arc using high speed spectroscopic measurement was elucidated by using the 2D high speed spectroscopic measurement system with beam splitter and band path filter and plasma image processing developed by this research representative. It is expected that the method of high speed oxide layer removal is obtained from this elucidation. Concretely, the removal process such as stagnation time, track, and species of vapor at oxide layer removal is elucidated with the above method, and then, the condition for fast oxide layer removal is elucidated. As a result, it takes a time for removing the oxide layer, and this time depends on the specific heat and thermal conductivity. Thus, the appropriate vapor amount value of stagnation time is important to maintain and move the vacuum arc. This technology with the knowledge for development of method of high speed removal process of oxide layer will be applied for the social needs of 3R.

利用本课题组研制的带分束器和带通滤波器的二维高速光谱测量系统和等离子体图像处理技术，阐述了高速光谱测量真空电弧氧化层去除过程。希望能从这一阐述中获得高速去除氧化层的方法。具体地说，用上述方法阐明了氧化层去除时的停滞时间、轨迹和蒸汽种类等去除过程，进而阐明了快速去除氧化层的条件。因此，去除氧化物层需要时间，并且该时间取决于比热和热导率。因此，适当的滞止时间的蒸汽量值对于维持和移动真空电弧是重要的。该技术结合高速去除氧化层工艺方法的开发知识，将应用于3R的社会需求。