Improvement in Characteristics of Crystalline Silicon Solar Cells by High-Pressure Water Vapor Heat Treatment

采用高压H2O水蒸气对a-Si：Hp-i-n太阳电池进行热处理，提高了a-Si：Hp-i-n太阳电池的转换效率。构建了微波透过率测量系统，对两种不同波长的光照射下的有效少子寿命进行了精确测量。该技术对半导体器件加工过程中的半导体质量特别是光敏性监测具有一定的应用价值。

Improvement in a conversion efficiency of a-Si:H p-i-n solar cells were achieved by heat treatment with high-pressure H2O vapor. This treatment has a capability of curing poor solar cell characteristics.We constructed the microwave transmittance measurement system to precisely measure the effective minority carrier lifetime with the two different wavelength light illumination. The present technique has a capability of application to monitoring semiconductor quality especially photosensitivity in semiconductor device processing.