Improvement in Characteristics of Crystalline Silicon Solar Cells by High-Pressure Water Vapor Heat Treatment

采用高压水蒸气热处理提高了a-Si：H p-i-n太阳电池的转换效率。我们建立了微波透过率测量系统，在两种不同波长的光照射下，精确测量了有效少数载流子寿命。本技术具有应用于监测半导体质量特别是半导体器件处理中的光敏性的能力。

Improvement in a conversion efficiency of a-Si:H p-i-n solar cells were achieved by heat treatment with high-pressure H2O vapor. This treatment has a capability of curing poor solar cell characteristics.We constructed the microwave transmittance measurement system to precisely measure the effective minority carrier lifetime with the two different wavelength light illumination. The present technique has a capability of application to monitoring semiconductor quality especially photosensitivity in semiconductor device processing.