Development of De-molding Agent-Free Resin Mold for UV Nanoimprint

在UV压印过程中，石英模具的结垢是一个严重的问题。建立了复制树脂模具的制作工艺。在此基础上，设计了一种无需脱模剂处理的复制树脂模具。评价了再模具表面性能与UV固化树脂表面性能之间的关系。

The fouling of the quartz mold during the UV imprint process is a serious problem. A process for making the replicated resin mold was established. Furthermore, the replicated resin mold which was not required a treatment with de-molding agent was devised. A relationship between the surface property of the reinmold and that of the UV cured resin surface was evaluated.