Fabrication of high-performance devices using imprinting onto chalcogenide glasses

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A mid-infrared wire-grid polarizer with a 500-nm pitch was fabricated on a low toxic chalcogenide glass (Sb-Ge-Sn-S system) by the thermal imprinting of periodic grating followed by the thermal evaporation of Al metal. After imprinting, deposition of Al on the grating at oblique angle produced a wire-grid polarizer. The fabricated polarizer showed polarization with TM transmittance greater than 60% wavelengths and an extinction ratio greater than 20 dB at 5-9 um wavelengths.