Fabrication of ordered aluminum surface based on pattern transfer using sphere mask

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To fabricate ordered patterns on various substrates such as aluminum and semiconductors, a photoresist mask with periodic opening arrays was prepared by sphere photolithography. The diameter and interval of the openings of the photoresist mask could be controlled independently by adjusting the diameter of silica spheres used as a lens and exposure time. For example, through this resist mask with a two-dimensional (2D) hexagonal array of openings, the pore growth of InP during anodic etching was investigated. The isolated openings could act as initiation sites for the radial growth of pores, resulting in the formation of 2D hexagonal geometric patterns. A natural lithographic approach based on the structural feature of spontaneously generated patterns will offer a new route to the fundamental study of the fabrication of ordered surfaces over large area.