Transportation of dust particles by solitary-wave electric field in plasma

我们开发了在尘埃等离子体中制备纳米粒子复合薄膜的自下而上的新工艺。我们得到了三个主要结果。(I)我们在反应放电等离子体中产生了尘埃颗粒。尘埃粒子的出现导致了Ar亚稳态原子数密度的增加，这是由于电子温度等等离子体参数的剧烈变化所致。我们还观察到了尘埃粒子云中的空洞结构，这可以用作用于尘埃粒子的离子阻力效应来很好地解释。(2)利用外加电场，成功地实现了尘埃颗粒的输运。粉尘粒子从底部离子鞘区域动态移动到距离底部离子鞘区域1 cm以上的上衬底。(3)我们制备了纳米颗粒复合薄膜，在等离子体中制备了直径为6-11 nm的晶态硅纳米颗粒，并成功地将其传输到衬底上。

We have developed new bottom-up process for the fabrication of nanoparticle composite thin films in dusty plasma. We have obtained three main results. (i) We produced dust particles in reactive discharge plasma. The appearance of dust particles leaded to an increase in number density of Ar metastable atoms, and this is due to the drastic change of plasma parameters such as electron temperature. We also observed the void structure in dust-particle cloud, which is well explained by the effect of ion drag force acting on the dust particles. (ii) We succeeded in the transportation of dust particles by applying the external electric field. The dust particles dynamically moved from the bottom ion-sheath region to the upper substrate which is located more than 1 cm away from the bottom ion-sheath region. (iii) We deposited nanoparticle composite thin films, where crystalline Si nanoparticles of 6-11 nm diameter were produced in plasma, and they were successfully transported to the substrate.