Building a Coincident Multi-Hit COLTRIMS Imaging Apparatus

我们项目的主要目标是在哈希姆大学物理系建立和运行一个符合多击COLTRIMS成像系统（COLD目标反冲离子动量光谱）。这种技术将在以后用于研究电子-原子和电子-分子碰撞的动力学。目标是识别潜在的微观电子驱动过程。这些工艺对于许多应用例如用于微电子器件的材料的等离子体处理、等离子体增强化学气相沉积（CVD）、废物储存库的稳定性具有极其重要的意义。使用COLTRIMS成像技术可以几乎完全检测所有碎片的矢量动量，对于电子-原子和电子-分子碰撞具有相对较高的分辨率。因此，这些碰撞的各种功能可以深入调查，旨在定量了解许多电子动力学。

The primary goal of our project is to build up and operate a coincidence multi-hit COLTRIMS imaging system (COLd Target Recoil Ion Momentum Spectroscopy) in the physics department at the Hashemite university. This technique will be later employed to study the dynamics of the electron-atom and electron-molecule collisions. Goal is to identify the underlying microscopic electron driven processes. These processes are of immense importance for many applications such as plasma processing of materials for microelectronic devices, plasma-enhanced chemical vapor deposition (CVD), stability of waste repositories. Using the COLTRIMS imaging technique allows a nearly complete detection of the vector momenta of all fragments with comparatively high resolution for electron- atom and electron-molecule collisions. Thus the various features of these collisions can be in-depth investigated aiming at a quantitative understanding of the many electron dynamics.