Resarch on an extremely short-external-cavity tunable laser diode

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A wavelength measuring method, which uses a laser diode (LD) attached on a flying slider and a mirror (semi-transparent optical disk) for an extremely short-external-cavity, is proposed.Not only the wavelength but also the side-mode suppression ratio, the spectrum line width and the mode interval are experimentally investigated, with the external-cavity length, the reflectivity of the LD facet, and the drive current as parameters. We achieved a range of 23nm by changing the external-cavity length for a 1.3 mum wavelength laser diode with antireflection coating on the facet facing the external mirror.The photothermal deflection of a microcantilever is much increased with a bimorph and an antireflection structure. The deflection is more than half wavelength by the temperature rise of 100ﾟC which is expected by an optical absorptance of over 98% for the antireflection coating of Au/Si_3N4/Au fabricated on the bimorph structure.As a result, the designed cantilever monolithically integrated on gallium arsenide (GaAs, 2lambda=0.83 mum) or indium phosphide (InP, lambda=1.3 mum) will be used for the external-cavity length change of a tunable laser diode.