Resarch on an extremely short-external-cavity tunable laser diode

极短外腔可调谐激光二极管的研究

• 批准号: 09650056
• 负责人: UKITA Hiroo
• 金额: $ 1.98万
• 依托单位: Ritsumeikan University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650056/
• 关键词: tunable laser diode; external-cavity laser diode; photothermal effect; InP; microcantilever; bimorph structure; thermal strain; antireflection coating; バイモルブ膜; GaAs系

A wavelength measuring method, which uses a laser diode (LD) attached on a flying slider and a mirror (semi-transparent optical disk) for an extremely short-external-cavity, is proposed.Not only the wavelength but also the side-mode suppression ratio, the spectrum line width and the mode interval are experimentally investigated, with the external-cavity length, the reflectivity of the LD facet, and the drive current as parameters. We achieved a range of 23nm by changing the external-cavity length for a 1.3 mum wavelength laser diode with antireflection coating on the facet facing the external mirror.The photothermal deflection of a microcantilever is much increased with a bimorph and an antireflection structure. The deflection is more than half wavelength by the temperature rise of 100ﾟC which is expected by an optical absorptance of over 98% for the antireflection coating of Au/Si_3N4/Au fabricated on the bimorph structure.As a result, the designed cantilever monolithically integrated on gallium arsenide (GaAs, 2lambda=0.83 mum) or indium phosphide (InP, lambda=1.3 mum) will be used for the external-cavity length change of a tunable laser diode.

提出了一种利用飞滑块和反射镜（半透明光盘）连接的激光二极管（LD）测量极短外腔波长的方法。以外腔长度、LD面反射率和驱动电流为参数，实验研究了波长、侧模抑制比、谱线宽度和模式间隔。我们通过改变1.3 μ m波长的激光二极管的外腔长度，在面向外镜的面上涂上增反射涂层，实现了23nm的范围。双晶片和增透结构大大增加了微悬臂梁的光热偏转。在双晶片结构上制备的Au/Si_3N4/Au增透膜，当温度升高到100 C时，其光吸收率可达98%以上。因此，设计的悬臂单片集成在砷化镓（GaAs, 2lambda=0.83 mum）或磷化铟（InP, lambda=1.3 mum）上，将用于可调谐激光二极管的外腔长度变化。

项目成果

浮田宏生: "光マイクロマシン技術の進展" 電気情報通信学会誌. 81, 12. 1234-1244 (1998)

Hiroo Ukita：“光学微机械技术的进展”电气信息和通信工程师学会杂志 81, 12. 1234-1244 (1998)。

浮田宏生、田邊裕一郎、増田陽一郎: "可変波長半導体レーザ 特願平09-005922 (特許)"

Hiroo Ukita、Yuichiro Tanabe、Yoichiro Masuda：“可调谐波长半导体激光器专利申请09-005922（专利）”

浮田宏生: "光マイクロマシン(巻頭言)" 光学. 26, 6. p.305 (1998)

Hiroo Ukita：“光学微机械（前言）”光学，26, 6. p.305 (1998)

Bijan Ghafary, Suo Donghui and Masakatsu Okada: "Dynamics of an Optically Switched Bistable Semiconductor Laser" OPTICAL REVIEW. 5, No.2. 99-104 (1998)

Bijan Ghafary、Suo Donghui 和 Masakatsu Okada：“光开关双稳态半导体激光器的动力学”光学评论。

田邊裕一郎, 浮田宏生: "3層バイモルフ微小梁の熱変位拡大のための一設計" 電気学会マイクロマシン研究会資料. MM-98-5. 23-25 (1998)

Yuichiro Tanabe、Hiroo Ukita：“一种增加三层双压电晶片微梁热位移的设计”IEEJ Micromachine Research Group Materials。 MM-98-5（1998）。