Fabrication of micro strucutre by ultrahigh precision cutting

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Micro fabrication technologies, so called "Micromachines", have started from photolithographic techinques on silicon wafers based on the technologies of LSI fabrication. Those technologies have the difficulties in manufacturing three dimensional thick structures. The research project is aiming for fabrication of three dimensional structures using ultrahigh precision cuting techniques, which is quite different from other fabrication methods.Results of reseach during the project terms can be summed up as follows.Machininig of micro structures of hard materials. Hard materials like tungsten, ceramics and sapphires are suitable for micro tools used in the micro fabrication by ultrahigh precision cutting.The machining experiments are carried out with precision diamonod griniding wheel using ultrahigh 4-axis machine tool. Rod of tungsten are machined in the shape of cylinder with diameter less than 100 micrometer and the radius of end of the tip is estimated to be smaller than 1 micromenter.Through those results, it has proved that ultrahigh precision cutting techniques are quite effective in micro structure-fabrication.