Multi-physics simulator for micromachines based on new hybrid strongly coupled analysis

在这项研究中，基于结构、流体和静电场相互作用的层次化分解的有限元分析被应用于MEMS结构部件的振动分析。采用块Gauss-Seidel方法将相互作用划分为静电场和流固耦合。采用投影法将FSI分解为压力场和速度场。将建立的有限元分析方法应用于真空和空气中的微悬臂梁在阶跃静电力作用下的有限元分析。数值计算结果与实验结果的比较表明，本文的分析结果与实验结果吻合较好。结果表明，为了准确预测MEMS结构部件的振动特性，需要进行考虑结构、流体和静电场相互作用的数值分析。

In this study, a finite element (FE) analysis using hierarchal decompositions for the interaction of structural, fluidic and electrostatic fields is applied for vibration analyses of a MEMS structural component. The interaction is partitioned into the electrostatic field and the fluid-structure interaction (FSI) using the block Gauss-Seidel method. The FSI is split into the pressure and velocity fields using a projection method. The developed FE analysis is applied for a micro cantilever beam actuated by the step electrostatic force in vacuum and air. It was demonstrated from the comparisons among the numerical and experimental results that the proposed analyses provide the results consistent with the experimental results. It follows from the present results that the numerical analyses taking into account the interaction of the structural, fluidic and electrostatic fields are required for the accurate predictions of the vibration characteristics of the MEMS structural components.