Making Terahertz Mixer with SIS of Niobium Nitride

通过这项研究，我对以下问题进行了研究。关于超导电波探测装置，研究了SIS （NbCxN_<1-X>/ MgO / NbCxN_<1-X>）和晶格冷却型氮化铌光电子测热仪的制造和性能改进。对于SIS来说，类似的低漏电流元件的性能能够像过去一样实现。但是，由于我花了一些时间来获取新的RP溅射设备的溅射条件，所以延迟了SIS设备性能的提升。因此，高成流密度无法实现。一个测辐射热计把它做成了下面的形状。薄膜厚度为5- 15nm，宽度为10 μ m，长度为2 μ m，薄膜的临界温度为5- 8k。直流特性满意。虽然我尝试了100 GHz的电磁波进行射频特性测量，但我无法得到被设置损坏的结果。在形成氮化铌（NbCxN_<1- x >）薄膜时，超导电极损耗在1thz下获得了50 m Q的表面电阻。我认为这个值所能达到的损失很低。频率范围为。4-12 GHz，制作薄膜天线，微带槽天线（MSA）的比例模型。虽然我测量了一个阻抗，但由于设备的问题，我没有得到足够的结果。对天线的指向性进行了测量，获得了良好的特性。此外，在超半球透镜上对天线进行了均匀指向性测量，获得了良好的结果。可见的成为可行的天线，通过这是通过我得到了它。

With this research, I researched about the following matter.1. About a super-conduction electric wave detection device, Researched about a manufacture and improvement in performance of SIS (NbCxN_<1-X>/ MgO / NbCxN_<1-X>) and a lattice cooled type photoelectron bolometer with niobium nitride.For SIS, a performance of a similar low leak current element was able to come true as the past.However, because I took time to obtain the spattering condition of a new RP spatter equipment, improvement in performance of SIS device was delayed. Therefore, high becoming current density isn't realized more.A bolometer maked it with the following shape. Thin film thickness 5-15 nm, width : 10 mu m, length : 2 mu m. A critical temperature of a thin film obtained 5-8 K.DC characteristic satisfactorily. Though I tried RF characteristic measurement by electromagnetic waves of 100 GHz, I wasn't able to obtain result of being by seting damage.2. A loss of a super-conductive electrode obtained surface resistance 50 m Q at 1 THz, at a becoming niobium nitride (NbCxN_<1-X>) thin film. I can think a low loss attainable by this value.3. With a frequency range of. 4-12 GHz, I maked thin film antenna, scale model of MSA (Micro strip Slot Antnna).Though I measured an impedance, I don't obtain an enough result more, by a trouble of an equipment.A directivity measurement of an antenna was able to obtain a good characteristic. Further, an even directivity measurement of the antenna to have made a run on hyper hemisphere lense was able to obtain a good result. Are visible to becoming practicable of an antenna, by this are through I obtained it.