Making Terahertz Mixer with SIS of Niobium Nitride

用氮化铌SIS制作太赫兹混频器

• 批准号: 09554004
• 负责人: ISHII Kouichi
• 金额: $ 4.48万
• 依托单位: Kisarazu National College of Technology
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1998
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09554004/
• 关键词: Terahertz Mixer; Niobium Nitride; Magnesium Oxide; SIS; Bolometer; Thin filme antenna; Superconductive transmission line; Scale model; テラヘルツ; サブミリ波; 基板回路; 整合回路

With this research, I researched about the following matter.1. About a super-conduction electric wave detection device, Researched about a manufacture and improvement in performance of SIS (NbCxN_<1-X>/ MgO / NbCxN_<1-X>) and a lattice cooled type photoelectron bolometer with niobium nitride.For SIS, a performance of a similar low leak current element was able to come true as the past.However, because I took time to obtain the spattering condition of a new RP spatter equipment, improvement in performance of SIS device was delayed. Therefore, high becoming current density isn't realized more.A bolometer maked it with the following shape. Thin film thickness 5-15 nm, width : 10 mu m, length : 2 mu m. A critical temperature of a thin film obtained 5-8 K.DC characteristic satisfactorily. Though I tried RF characteristic measurement by electromagnetic waves of 100 GHz, I wasn't able to obtain result of being by seting damage.2. A loss of a super-conductive electrode obtained surface resistance 50 m Q at 1 THz, at a becoming niobium nitride (NbCxN_<1-X>) thin film. I can think a low loss attainable by this value.3. With a frequency range of. 4-12 GHz, I maked thin film antenna, scale model of MSA (Micro strip Slot Antnna).Though I measured an impedance, I don't obtain an enough result more, by a trouble of an equipment.A directivity measurement of an antenna was able to obtain a good characteristic. Further, an even directivity measurement of the antenna to have made a run on hyper hemisphere lense was able to obtain a good result. Are visible to becoming practicable of an antenna, by this are through I obtained it.

通过本研究，我研究了以下几个方面的问题。关于超导电波探测器件，研究了SIS(NbCxN_&lt；1-X&gt；/MgO/NbCxN_&gt；1-X&gt；1-X&gt；1-X因此，高变电流密度没有更多地实现。测辐射热计将其制成如下形状。薄膜厚度为5-15 nm，宽度为10微米，长度为2微米。薄膜的临界温度达到了5-8K。虽然我尝试了用100 GHz的电磁波测量射频特性，但没有得到设置损伤的结果。超导电极的损耗在1 THz处获得了50mQ的表面电阻，在形成NbCxN_&lt；1-X&gt；薄膜。我认为这样的价值能带来很低的损失。频率范围为。4-12 GHz，我制作了薄膜天线，MSA(微带缝隙天线)的比例尺模型。虽然我测量了阻抗，但由于设备的故障，我没有得到足够的结果。天线的方向性测量能够获得良好的特性。此外，对天线在超半球透镜上运行的均匀方向性进行了测量，获得了良好的结果。都是看得见的一根天线，就是通过这个我得到的。

项目成果

M.Guelin: "Detection of A New Linar Carbon Chain Radial:C7H" A&AP.L1. 317 (1997)

M.Guelin：“检测新的线性碳链径向：C7H”A

神代 暁: "サブテラヘルツ帯でのNbCxN_1-x薄膜の電極損失評価" 第46回応用物理学関係連合講演会講演予稿集. (1999)

Akira Kamishiro：“亚太赫兹频段 NbCxN_1-x 薄膜中的电极损耗评估”第 46 届应用物理协会会议记录（1999 年）。

S.Kohjiro: "Numerical Characterzation of Impedance Transformers Consisting of Vertically Stacked Superconducting Transmission Lines" IEEE Transactions on Applied Superconductivity. Vol.7. 2343-2346 (1997)

S.Kohjiro：“由垂直堆叠超导传输线组成的阻抗变压器的数值表征”IEEE 应用超导学报。

S.Kohjiro, M.Watanabe, H.Yamamori, S.Segawa, A.Shouji and U.Kawabe: "Evaluation of Electrode Loss of NbC_XN_<1-X> Films in Sub-Terahertz Frequency Region." EXTENDED ABSTRACTS (THE 46th SPRING MEETING,1999) THE JAPAN SOCIETY OF APPLIED PHYSICS AND REIATED

S.Kohjiro、M.Watanabe、H.Yamamori、S.Sekawa、A.Shouji 和 U.Kawabe：“亚太赫兹频率区域 NbC_XN_<1-X> 薄膜的电极损耗评估”。

石井孝一: "微小接合を考慮した超伝導素子の作製プロセス" 木更津工業高等専門学校紀要. 32号. 7-10 (1999)

Koichi Ishii：“考虑微结的超导器件的制造过程”木更津国立技术学院公告 32, 7-10 (1999)。