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Investigation on forming process of micro texture surfaces and evaluation of their surface function

微织构表面形成过程研究及其表面功能评价

基本信息

批准号：
09450058
负责人：
MASUDA Masami
金额：
$ 9.02万
依托单位：
Niigata University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
1997
资助国家：
日本
起止时间：
1997 至 1999
项目状态：
已结题

项目摘要

According to forming or machining process, most of surface functions are realized on the surfaces of components, which consist of microscopically random surfaces and are represented statistically. Therefore, the optimal design of function surfaces is significantly difficult. Here, sub-micron forming process for normalized micro texture surfaces covered with uniform grooves or dimples were discussed, and correlated with surface functions.As the results, the followings were verified.(1) Sub-micron grooving with burnishing tool : Dimensions of burr on a groove shoulder and radius on a groove bottom are controllable by work material. On the other hand, rubbing speed or friction on the interface between a workpiece and a burnishing tool is insensible to them.(2) Sub-micron dimple forming using indentor : Burr or droop on a dimple shoulder strongly correlated with friction on the interface between a workpiece and a indentor. The volume of dimples is approximately removed to the volume of burr on a dimple shoulder for non-ferrous metals, but the material under a indentor is condensed plastically for glass.(3) Forming and evaluation of photo lithography disk : Normalized magnetic disks covered with uniformed land of 3 μm in dimater and 30 nm in height were made tentatively on photo lithography process. Friction force loading on a magnetic head substantially increases on the disks along with sliding time, because not of wear on top surfaces of lands but of the subsidence of lands. The subsidence is caused by fatigue with repeated loaded from a magnetic head. The increase of friction force could be suppressed by optimizing the destribution of lands and applying harder material like glass to disk substrates.

根据成形或加工过程的不同，大多数曲面功能都是在零件表面实现的，零件表面由微观上的随机曲面组成，并用统计方法表示。因此，功能曲面的优化设计是非常困难的。讨论了均匀凹槽或凹坑覆盖的归一化微结构表面的亚微米加工过程，并与表面函数进行了关联。结果表明：(1)用抛光工具进行亚微米刻槽：凹槽肩部毛刺的尺寸和凹槽底部的半径可由加工材料控制。另一方面，摩擦速度或抛光工具之间的摩擦对他们来说是不敏感的。(2)使用压痕形成亚微米凹陷：凹陷肩上的毛刺或下垂与工件和压痕之间的摩擦力密切相关。对于有色金属，凹坑的体积几乎被去除到凹陷肩部的毛刺体积，而压痕下的材料被塑性地凝聚成玻璃。(3)光刻盘的形成和评价：在光刻工艺上试制了覆盖有3μm直径、30 nm高的均匀凸缘的归一化磁盘。随着滑动时间的延长，磁头上的摩擦力载荷在磁盘上大大增加，这不是由于凸台顶面的磨损，而是由于凸台的下沉。下沉是由于磁头反复加载引起的疲劳引起的。可以通过优化平台的分布和在磁盘基板上应用玻璃等较硬的材料来抑制摩擦力的增加。