A three dimensional measuring machine using a crystal as the scale reference

利用原子力显微镜和晶格实现了线性编码。通过选择摩擦面组合，实现了最大速度为20 μ m /s。速度对应于大约100kcounts/s的计数率，其中一个计数对应于一个晶格。由于扫描速度快，在数据采集过程中受漂移的影响很小。例如，假设漂移为1pm/s，则扫描1微米的时间内的漂移为1pm/s x 0.05 s = 0.05 pm。与其他错误原因相比，这是可以忽略不计的。上述结果很重要，因为在使用晶体作为尺度参考的传统仪器的情况下，漂移的影响是测量误差的主要原因。

A Linear encorder was realized using an atomic force microscope and a crystalline lattice. Maximum velocity of 20 microns/s was realized by selecting the combination of the rubbing surface. The velocity corresponds to a count rate of around 100kcounts/s, where one count corresponds to one lattice. Due to the fast scan rate, measurement is little affected by drift during the data acquisition. For example, assuming a drift of 1pm/s, the drift within the time to scan 1micron is 1pm/s x 0.05S = 0.05 pm. This is negligible compared to other cause of error. The above result is important, since in the case of conventional apparatuses using a crystal as the scale reference, the effect of drift was the dominant cause of measurement error.