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Interferometer optimisation in RPM

Interferometer optimisation in RPM
干涉仪转速优化
批准号:
10022190
负责人:
金额:
$2.02万
依托单位:
依托单位国家:
英国
项目类别:
Collaborative R&D
财政年份:
2022
资助国家:
英国
项目状态:
已结题
起止时间:
2022 至 --

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中文摘要
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英文摘要
Infinitesima develops and manufactures the Rapid Probe Microscope (RPM). It is a very high speed atomic force microscope (AFM) with particular application within the semiconductor industry. At the heart of the system is highly sensitive interferometric closed loop control over three (x,y,z) axes. The height (z axis) is the most challenging and also the most critical. Within this project we will explore, in collaboration with world class experts from NPL, if there are aspects of the design of this part of the system that can be further optimised to continuously improve the performance of this measurement system.
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