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Validation of pico-metre scale, multi-axis position sensing.

Validation of pico-metre scale, multi-axis position sensing.
验证皮米级、多轴位置传感。
批准号:
10023091
负责人:
金额:
$3.18万
依托单位:
依托单位国家:
英国
项目类别:
Collaborative R&D
财政年份:
2022
资助国家:
英国
项目状态:
已结题
起止时间:
2022 至 --

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中文摘要
翻译
Anemos制造了独特的、获得专利的多轴位置传感器(MAPS),可以用单个传感器测量平面和角坐标,达到极高的分辨率。通过广泛的模拟预测并在实践中得到部分验证的结果不仅远远超出了我们最初的亚微米目标,而且显然还扩展了现有计量设置的限制。特别是,控制运动和独立测量(验证)结果的能力代表了亚纳米位置传感领域的巨大挑战。这需要非常精细的机械控制,以及对温度、振动和其他环境变量的精密控制。此外,还需要根据可追溯的标准(如光学干涉仪)和第三方实验室进行可靠的验证。目标是建立一个实验系统,真正测试我们的技术极限,以应对新的高端市场机会。此外,在挑战极限的过程中,总是有很多不可预见的弱点和局限性需要了解:问题不仅仅是证明我们认为我们知道的东西,而是揭示我们不知道的东西。
英文摘要
Anemos builds unique, patented multi-axis position sensors (MAPS) that can measure planar and angular coordinates to extreme resolutions with a single sensor. What is predicted through extensive simulations and now partially proven in practice not only goes well beyond our original sub-micron objectives, but apparently also stretches the limits of existing metrology setups. In particular, the ability to control motion and independently measure (validate) the result represents a huge challenge in the realm of sub-nanometre position sensing. This requires extraordinarily fine mechanical control, and exquisite control of temperature, vibration, and other environmental variables. In addition, credible validation needs to be done against traceable standards such as optical interferometers and at third-party labs.The objective is an experimental system that can really test our technology to its limits in order to address new top-end market opportunities. Also, in pushing the envelope there is always much to learn about unforeseen weaknesses and limitations: the problem is not just to prove what we think we know, but to uncover what we don't.
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