MRI: Acquisition of a versatile pico-second laser and electroplating system for advanced device manufacturing and materials processing

这一重大研究仪器奖支持为北卡罗来纳州立大学(北卡罗来纳州立大学)购买1类皮秒激光器和互补的反向脉冲电镀系统。这些工具将极大地增强大学的制造能力，该大学还为来自附近大学、学院、高中和行业的研究人员提供服务。该设备将立即用于由PI领导的广泛研究活动，3名合作PI，以及电子、材料工程和生物领域的16名高级人员。此外，这些仪器将设在纳米加工设施(NNF)，这是一个共享设施，也是研究三角纳米技术网络(RTNN)的一部分，这将确保来自北卡罗来纳州州、当地大学和行业的各种用户可以轻松访问。这将产生技术影响，使加工材料、合成非传统纳米/微材料和制造设备的新战略成为可能，同时刺激新的大学间和大学内的研究，并加强北卡罗来纳州与工业的关系。由于该工具接受标准的计算机辅助设计文件，并包括直观的用户界面，因此建议的工具特别适合于培训学习曲线较低的下一代研究人员。这为本科生、毕业生和高中生以及附近高中和社区大学的教师提供了通过现有的外展计划参与和教育的机会。因此，这些工具将用于各种高级研究和培训目的。皮秒激光将允许对小至20微米的特征进行切割/构图，并可以加工各种材料(软、硬、有机、无机、金属)，应用范围从能源到无机物、电子、生物医学系统和软材料。当使用标准光刻、印刷或二氧化碳激光等常规工具进行图案化时，该工具在处理不兼容和/或导致分辨率较差的材料时特别有用。激光器在异质制造中特别有用，这对实现传统技术不容易实现的下一代设备至关重要。PI/co-Pis和高级人员打算处理大量材料，如聚合物、碳纳米材料、金属、无机物、玻璃、硅、纸和纺织品，用于1)组织集成传感器；2)有机、半导体和自折叠电子设备；3)机器人和执行器；4)光电材料；5)微流体。该奖项反映了NSF的法定使命，并通过使用基金会的智力优势和更广泛的影响审查标准进行评估，被认为值得支持。

This Major Research Instrumentation award supports the acquisition of a class 1, pico-second laser and a complementary reverse-pulse electroplating system for North Carolina State University (NC State). These tools will greatly enhance the fabrication capabilities of the university which also serves researchers from nearby universities, colleges, high schools, and industry. The equipment will find immediate use in a wide range of research activities led by the PI, 3 co-PIs, and 16 senior personnel in the areas of electronics, materials engineering, and biology. Moreover, the instruments will be located in the Nanofabrication Facility (NNF), a shared facility and part of the Research Triangle Nanotechnology Network (RTNN), which will ensure easy access to a rich variety of users from NC State, local universities and industry. This will create technological impact by enabling new strategies for processing materials, synthesizing unconventional nano/micro materials, and fabricating devices while stimulating new inter and intra-university research and strengthen NC State’s relationships with industry. The proposed instruments are uniquely suited for training next generation researchers with a low learning curve since the tool accepts standard computer aided design files and includes an intuitive user interface. This creates the opportunity to involve and educate undergraduates, graduates, and high school students, as well as teachers from nearby high schools and community colleges through existing outreach programs. The tools will therefore be useful for various advanced research and training purposes. The pico-second laser will allow cutting/patterning of features as small as 20 microns and can process a wide range of materials (soft, hard, organic, inorganic, metallic) for applications ranging from energy to inorganics, electronics, biomedical systems, and soft materials. The tool is especially useful in processing materials that are either incompatible and/or result in poor resolution when patterned using conventional tools such as standard lithography, printing, or carbon dioxide lasers. The laser is particularly useful in heterogenous fabrication crucial for realizing next-generation devices that are not easily achievable through conventional techniques. The PI/co-PIs and senior personnel intend to process numerous materials such as polymers, carbon nanomaterials, metals, inorganics, glass, silicon, paper, and textiles for 1) tissue-integrated sensors; 2) organic, semiconducting, and self-folding electronics; 3) robotics and actuators; 4) opto-electronic materials; and 5) microfluidics.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.