Feasibility study for a high throughput multiprobe Rapid Probe Microscope system

半导体集成电路(IC)或硅芯片的生产是一个3200亿GB的行业，在功能、能源消耗和每功能成本方面实现了指数级的增长。这个市场支撑着3.7万亿GB的技术部门，并使智能手机、5G网络和人工智能等新技术的引入成为可能。持续的规模越来越需要复杂的三维集成方案和相关的表征技术。目前，光学和电子束技术主导着52亿GB的IC计量和检查市场，但缺乏下一代半导体工艺所需的分辨率(光学)和三维能力。原子力显微镜(AFM)可以通过提供分辨率和三维能力来克服这些限制。它们已经用于半导体研发和离线故障分析。然而，在半导体生产环境中，对晶片上的多个位置进行成像需要长达一个小时的时间，这对于半导体生产环境来说太慢了。Infinitesima开发了一种新的AFM测量技术，与更传统的AFM系统相比，该技术具有显著的优势。快速探针显微镜(RPM)集成了独特的光热驱动和干涉检测系统，可提供皮度计级别的真实3D表面测量。RPM的扫描速度比目前市场上提供的扫描速度快100倍。Infinitesima已经确定了一种潜在的方法，通过多路复用扫描探头和相关的电子、光学和数据采集系统来进一步提高扫描速度。试验性可行性研究成功地实施了证明原则的台式系统，演示了与这一方法相关的关键概念并降低了风险。提出的扫描探头阵列的驱动和测量解决方案已得到验证，并已提交专利申请。与外部AFM探头制造公司的合作也导致了不同间距大小和纵横比的多探头杠杆的成功设计和制造。该公司现在能够开始从工作台系统向当前RPM晶圆自行车平台的完全集成过渡。其中一个重大挑战将是光学子系统的小型化和重新配置，使其能够在有限的可用空间内容纳。Infinitesima相信，该项目将为将原型多探头系统集成到当前的RPM平台提供一条明确的路线，并为满足当前和未来的市场需求提供一条可行的路线。

Production of semiconductor Integrated Circuits (IC), or silicon chips is a £320 billion industry that has delivered exponential scaling in functionality, energy consumption, and cost per function. This market underpins the £3.7 trillion technology sector and enabled introduction of new technologies such as smart phones, 5G networks, and artificial Intelligence. Continued scaling increasingly requires complex three-dimensional integration schemes and associated characterisation techniques.Optical and electron beam technologies currently dominate the £5.2 billion market for IC metrology and inspection but lack the resolution (optical) and 3-dimentional capability required for the next generation of semiconductor processes. Atomic Force Microscopes (AFMs) can overcome these limitations by providing both the resolution and 3-dimensional capability. They are already used in semiconductor R&D and offline failure analysis. However, it takes up to an hour to image multiple sites on a wafer which is too slow for the semiconductor production environment.Infinitesima has developed a novel AFM measurement technique that offers significant advantages when compared to more conventional AFM systems. The Rapid Probe Microscope (RPM) integrates a unique opto-thermal actuation and interferometric detection system that can provide true 3D surface measurements with picometer levels of precision. The RPM is also capable of scanning speeds \>100x faster than is currently available within the market.Infinitesima has identified a potential method of increasing scanning speeds even further by multiplexing the number of scanning probes and associated electronics, optics, and data acquisition systems. Experimental feasibility studies have led to the successful implementation of a proof-of-principal bench top system, demonstrating and de-risking key concepts associated with this approach. The proposed solution for the actuation and measurement of the scanning probe array has been validated and has resulted in a patent filing. Collaboration with an external AFM probe manufacturing company has also led to the successful design and fabrication of multiprobe levers of varying pitch size and aspect ratio. The company is now able to start the transition from the bench top system to full integration within the current RPM wafer cycling platform. One of the significant challenges will be in the miniaturisation and reconfiguration of the optical subsystems in a way that can fit within the limited space envelope available. Infinitesima believes that this project will provide a clear route to integrating the prototype multi-probe system into the current RPM platform, and a viable route to address current and future market requirements.