Real-time monitoring and control of magnetron sputter deposition of thin coatings

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The aim of this project is to develop a strategy for real-time monitoring and control of physical vapourdeposition processes to increase the reproducibility of vital parameters such as coating thickness, coatingcomposition, coating adhesion and vacuum quality and thereby provide significantly enhanced qualityassurance of the coatings produced. This will enable penetration of the estimated seventy five percent of themarket for PVD coatings in high value manufacturing that is not currently served, supporting innovation in thisimportant sector of the UK economy. Monitoring and control of all process stages – evacuation, substratecleaning and coating deposition - will be, innovatively, undertaken using a single technology – optical emissionspectrometry. This will be used to identify and monitor relevant emission lines associated with particularprocess stages to identify and signal end points, including the thickness of the coating deposited. The approachwill also be applied to condition monitoring of the coating equipment to optimise maintenance schedules andsystem availability