Delta X: Next Generation X-Ray Metrology for low power, high efficiency electronics device research

Delta X：用于低功耗、高效率电子设备研究的下一代 X 射线计量

• 批准号: 720088
• 金额: $ 20.36万
• 依托单位: JORDAN VALLEY SEMICONDUCTORS UK LIMITED
• 依托单位国家: 英国
• 项目类别: GRD Development of Prototype
• 财政年份: 2012
• 资助国家: 英国
• 起止时间: 2012 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=720088
• 关键词: Delta; Next; Generation; Ray; Metrology

The Delta_X project is to develop a X-ray metrology system for the semiconductor industry,capable of measuring and monitoring the key thin films required for low power, highefficiency devices. These devices are being developed to be used in several applications; fromsolid state LED lighting, solar cells and more efficient high power electronics. All of theserequire measurement of nanoscale films to improve the performance of the devices andmanufacturing efficiency. The films are becoming more complex, meaning existing metrologyis not capable of giving the required information in a reasonable timescale for themanufacturer. The new Delta_X system will incorporate new technology on both X-ray sourcand detector to allow the measurement of these advanced films to accelerate the productdevelopment and improve the production process of these critical devices enabling theacceleration of higher efficiency lighting and electronics into mainstream use, thus reducingcarbon emissions and reducing energy consumption.

Delta_X项目旨在为半导体行业开发一种X射线计量系统，能够测量和监控低功率、高效率器件所需的关键薄膜。这些器件正在开发中，用于多种应用;从固态LED照明，太阳能电池和更高效的高功率电子产品。所有这些都需要对纳米薄膜进行测量，以提高器件的性能和制造效率。这些电影变得越来越复杂，这意味着现有的计量学无法在合理的时间范围内为制造商提供所需的信息。新的Delta_X系统将在X射线源和探测器上采用新技术，以允许测量这些先进的薄膜，从而加速产品开发并改进这些关键设备的生产过程，从而加速更高效率的照明和电子产品的主流使用，从而减少碳排放和减少能源消耗。