Delta X: Next Generation X-Ray Metrology for low power, high efficiency electronics device research

点击翻译按钮获取中文摘要

The Delta_X project is to develop a X-ray metrology system for the semiconductor industry,capable of measuring and monitoring the key thin films required for low power, highefficiency devices. These devices are being developed to be used in several applications; fromsolid state LED lighting, solar cells and more efficient high power electronics. All of theserequire measurement of nanoscale films to improve the performance of the devices andmanufacturing efficiency. The films are becoming more complex, meaning existing metrologyis not capable of giving the required information in a reasonable timescale for themanufacturer. The new Delta_X system will incorporate new technology on both X-ray sourcand detector to allow the measurement of these advanced films to accelerate the productdevelopment and improve the production process of these critical devices enabling theacceleration of higher efficiency lighting and electronics into mainstream use, thus reducingcarbon emissions and reducing energy consumption.