Development of Smart NDIR CO2 Gas Detector Based on MEMS CMOS IR Source and Detector Technology of Capnography applications

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Cambridge CMOS Sensors (CCS) is one of the leading providers of ultra-low power, hightemperature micro-hotplate devices that is readily integrated on the same silicon platform usedfor microprocessor chips, thereby enabling the capabilities of producing a new generationminiature sensors for medical, consumer, industrial and automotive applications. Incollaboration with University of Cambridge, and large multi-national silicon foundry partners,CCS has pioneered the production of these micro-hotplates by developing and optimisingDeep Reactive Ion Etching (DRIE) process that is used for making Micro ElectromechanicalSystem (MEMS) components. The benefit of CCS technology is that it uses standardComplementary Metal Oxide Semiconductor (CMOS), silicon wafers, which is ideal for highvolume, low cost applications. These micro-hotplate devices have many uses, which includesminiature catalytic and resistive gas sensors, broadband mid-infrared emitter for gas sensingand spectroscopy applications, flow sensors, and smart sensors with on-chip control circuits.One of the first products developed by CCS based on micro-hotplates is the broadband midinfraredemitter. These emitters are being used for Non-Dispersive Infrared (NDIR) gassensing applications for greenhouse gas monitoring (such as carbon dioxide, methane,nitrogen oxide) as well as human breath analysis for medical applications (such as carbondioxide monitoring). Furthermore, using the same platform technology CCS has alsodeveloped highly innovative matching broadband IR detectors that are used with the emitterfor NDIR gas sensing application. In this project we aim to take advantage of the aboveunique technological advantages to develop one of the most compact carbon dioxide, (CO2)gas sensors for human breath analysis that will focus on enabling low cost capnographyapplications but without compromising on accuracy.