READ-OUT INSTRUMENTATION FOR X-RAY CONTACT MICROSCOPY

普林斯顿大学的软X射线激光器（18.2 nm波长，10-30 nsec 脉冲），可以在抗蚀剂上产生水中活细胞的图像。 与普林斯顿大学合作，PXL Inc.正在研发激光器， 更短的波长 有现实的前景获得激光 作用于10 nm以下，低至1 nm。 可行的生物医学用途需要方法 方便、准确地从X射线曝光中提取信息， 抗蚀剂：最终，横向和垂直分辨率-10 nm必须 得到了 目前的显微镜不太可能实现这些目标。 这 该提案旨在将新的显微镜应用于读出问题。 在第一阶段，X射线激光产生的细胞图像将通过以下方法进行检查： Nomarski（NM）、扫描电子（SEM）、扫描隧道（STM）和原子 力（AFM）显微镜建立最有效的方法， 用AFM感测头修改STM以阅读光致抗蚀剂。 第二阶段的目标将是建立一个方便用户的工具， 在STM和AFM头上，用于读出具有生物图像的抗蚀剂 准确度为~ 10 nm的电池。 在第二阶段的最后阶段， 仪器将应用于免疫系统和癌细胞。 二期 将生产该仪器的商业原型。

A soft X-ray laser at Princeton University (18.2 nm wavelength, 10-30 nsec pulses), can produce images of live cells in water on resist. Collaborating with Princeton University, PXL Inc. is developing lasers with shorter wavelengths. There are realistic prospects for obtaining laser action below 10 nm, down to 1 nm. Viable biomedical use requires methods to relieve information conveniently and accurately from X-ray exposed resists: eventually, lateral and vertical resolutions -10 nm must be obtained. Current microscopies are unlikely to achieve these goals. This proposal aims at applying novel microscopies to the read-out problem. In Phase I, images of cells produced by the X-ray laser will be examined by Nomarski (NM), scanning electron (SEM), scanning tunneling (STM) and atomic force (AFM) microscopies to establish the most effective methods of modifying the STM with an AFM sensing head for reading out photoresists. Goals of Phase II will be construction of a user-friendly instrument, based on STM and an AFM head, for read-out of resists with images of biological cells with accuracies of -10 nm. In the final stages of Phase II, this instrument will be applied to immune systems and cancer cells. Phase II will produce a commercial prototype of the instrument.