Ionic liquids for subtractive and additive nanomanufacturing

用于减材和增材纳米制造的离子液体

• 批准号: MR/Y034376/1
• 负责人: Carla Perez Martinez
• 金额: $ 75.79万
• 依托单位: University College London
• 依托单位国家: 英国
• 项目类别: Fellowship
• 财政年份: 2024
• 资助国家: 英国
• 起止时间: 2024 至 无数据
• 项目状态: 未结题
• 来源: https://gtr.ukri.org/projects?ref=MR%2FY034376%2F1
• 关键词: Ionic; liquids; subtractive; additive; nanomanufacturing

I propose investigating the use of ionic liquids for materials treatment, specifically in nanotechnology. Nanotechnology is the manipulation of matter at molecular scales close to one billionth of a meter. Progress in manufacturing at this scale has enabled the fabrication of modern electronic and biomedical technologies. However, more advanced processes are required to manufacture even faster computers, better drug delivery systems, and many other future technologies. In this project, ionic liquids will be used to access new options for these manufacturing processes. These exciting new liquids have been developed over the last two decades for a range of chemistry and energy storage applications. Ionic liquids consist entirely of charged complex molecules (ions) at room temperature, which allows for a new approach to nanotechnology manufacturing with a device known as an Ionic Liquid Ion Source (ILIS). In an ILIS, the ionic liquid covers a sharp needle. By applying a high voltage to this needle, it is possible to produce a beam of ions from the liquid. This spray can be directed towards a material for treatment. Different ion combinations would be available for various materials processing applications, as ionic liquids have been extensively studied, and hundreds of stable compositions have been discovered. For example, the beam can contain reactive ions, and can be used to remove material from silicon, a common material used in microprocessors. Varying the beam conditions and composition can allow for both the erosion of material (subtractive method) and the deposition of a thin film on the surface or to create a structure (additive method). I will explore the interactions of the ILIS beam with different materials, study the use of ILIS for material removal and deposition, and investigate the possibility of focusing the beam of ILIS for careful processing of materials at the nanoscale. In the first stage of this fellowship (2020-2024) a vacuum chamber was constructed; this chamber is being used for detailed characterization of emission from different ionic liquids. ILIS beams are comprised of several different ion types, and so a filter is being used to separate these components. The separate ion types are being fired towards a variety of materials to understand how specific ions react with different targets. These fundamental studies are being complemented by experiments that use an ILIS to remove material and create a nanoscale pattern. Additional experiments can be performed with an array of ILIS devices, in order to achieve higher throughput. The possibility of depositing thin films of ionic liquids from an ILIS beam is also under study. The fellowship is developing a focused ion beam (FIB) from an ILIS; FIB machines take the beam of particles from an ion source and focus the particles onto a nanometre sized-spot on a target, thus allowing localized modifications to a sample. Computer simulations are being used to design a bespoke focusing setup in which the ILIS is being installed.In the renewal stage of the fellowship (2024-2027), experiments will be undertaken to quantify how well the ILIS-FIB beam is focused, using different ionic liquids and different operating conditions in the focusing setup. The ILIS-FIB platform will be used in several applications, for instance microscopy or precise milling at the nanoscale. Another avenue of research will be to study the possibility of creating three-dimensional nanostructures by depositing material with the focused ion beam of ionic liquid particles.

我建议研究用离子液体用于材料处理的使用，特别是在纳米技术中。纳米技术是在分子尺度上对物质进行操纵，接近十亿米。在这种规模的制造业进步已经使现代电子和生物医学技术的制造能够制造。但是，需要更高级的流程来制造更快的计算机，更好的药物输送系统以及许多其他未来的技术。在该项目中，离子液体将用于访问这些制造过程的新选项。这些令人兴奋的新液体在过去的二十年中已经开发了一系列化学和储能应用。离子液体完全由带电的复合物分子（离子）组成，在室温下，它允许使用称为离子液体离子源（ILIS）的设备进行纳米技术制造的新方法。在ILI中，离子液体覆盖了尖锐的针头。通过将高压施加到该针上，可以从液体中产生一束离子。该喷雾可以针对治疗材料。由于已经广泛研究了离子液体，并且已经发现了数百种稳定的组合物，因此可以为各种材料加工应用提供不同的离子组合。例如，梁可以包含反应性离子，可用于去除微处理器中使用的常见材料中的材料。改变光束条件和组成可以允许材料的侵蚀（减法方法）和薄膜在表面上的沉积或创建结构（加法方法）。我将探索ILIS光束与不同材料的相互作用，研究ILI用于材料去除和沉积的使用，并研究将ILIS束聚焦以仔细处理纳米级材料的可能性。在该团契的第一阶段（2020-2024）建造了一个真空室。该腔室用于详细表征不同离子液体的发射。 ILIS梁由几种不同的离子类型组成，因此使用过滤器将这些组件分开。单独的离子类型正在向各种材料发射，以了解特定离子与不同靶标的反应。这些基本研究正在通过使用ILI去除材料并创建纳米级模式的实验补充。为了获得更高的吞吐量，可以使用一系列ILIS设备进行其他实验。还研究了从ILIS束沉积离子液体的薄膜的可能性。研究金正在从ILIS开发出聚焦的离子束（FIB）； FIB机器将颗粒的光束从离子源中取出，并将颗粒聚焦到靶标上的纳米尺寸上，从而可以对样品进行局部修改。计算机模拟正在设计定制的焦点设置，其中ILI的安装。在奖学金的更新阶段（2024-2027），将进行实验，以量化ILIS-FIB束的焦点，并使用不同的离子液体和不同的工作条件进行焦点设置。 ILIS-FIB平台将用于多种应用，例如显微镜或纳米级的精确铣削。研究的另一个途径将是研究通过将材料沉积的离子液体颗粒的离子束来创建三维纳米结构的可能性。