Nanofabrication of high performance AFM cantilevers

高性能 AFM 悬臂梁的纳米制造

• 批准号: 6636702
• 负责人: JAN H HOH
• 金额: $ 23.67万
• 依托单位: JOHNS HOPKINS UNIVERSITY
• 依托单位国家: 美国
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-06-01 至 2004-05-31
• 项目状态: 已结题
• 来源: https://reporter.nih.gov/project-details/6636702
• 关键词: atomic force microscopy; bioengineering /biomedical engineering; bioimaging /biomedical imaging; biomedical equipment development; nanotechnology; optics; particle beam; silicon

DESCRIPTION (provided by applicant): The long-term objective of this proposal is to develop high performance atomic force microscope (AFM) cantilevers for application to biomedical research. The AFM is emerging as a powerful tool for biomedical research, and has found applications that include imaging of DNA, measuring local surface electrostatics on membranes, mapping mechanical properties of cells and single molecule protein mechanics. It is also considered a central enabling technology in nanotechnology. One of the limiting elements in current AFMs is the cantilever. The performance of a cantilever is primarily characterized by a combination of spring constant and resonance frequency. We propose to develop new cantilevers with resonance frequencies in the range 1-100 MHz in solution, for cantilevers with a spring constant of 0.1 N/m. This resonance frequency is approximately one to three orders of magnitude better than the best cantilevers that are currently available. The new cantilevers will be constructed by two independent methods, focused ion beam milling of conventional silicon or silicon nitride cantilevers and electron beam deposition. Cantilevers with leg a thickness of 100 nm or less will and widths of 100 nm or less will be milled using an ion beam from the material at the end of a conventional cantilever, producing a compound cantilever with a small high performance cantilever at the free end of the larger one. Similar compound cantilevers will be constructed by electron beam deposition plastic like nanostructures in the shape of small cantilevers. Among other things, these new cantilevers will allow faster scanning, increase the temporal resolution of force measurement, improve measurement sensitivity by reducing cantilever noise, and improve sensitivity by reducing cantilever spring constant. To use these new cantilevers, we propose to construct an AFM head with appropriate optics to work with very small cantilevers and position sensor with data acquisition system with a detection bandwidth of at least 100 MHz. This detector will be used to characterize physical properties of the new cantilevers. In addition, we will test the performance of the new cantilevers in electrostatic mapping experiments where we expect improve sensitivity and a bilayer fusion experiment in which we expect to uncover new dynamics lipid rearrangement during fusion.

描述（由申请人提供）：本提案的长期目标 是开发高性能的原子力显微镜（AFM）杠杆， 应用于生物医学研究。原子力显微镜正在成为一个强大的工具， 生物医学研究，并已发现的应用，包括成像的DNA， 测量膜上的局部表面静电，绘制机械 细胞的性质和单分子蛋白质力学。也是 被认为是纳米技术的核心技术。其中一个限制 目前AFM中的主要元件是悬臂梁。悬臂梁的性能是 主要特征在于弹簧常数和共振的组合 频率.我们建议开发具有共振频率的新杠杆， 对于弹簧常数为0.1的杠杆，溶液中的范围为1-100 MHz N/m。该谐振频率大约是一至三个数量级 比目前可用的最好的杠杆更好。新 将采用两种独立的方法来构造悬臂梁，聚焦离子束 常规硅或氮化硅的研磨 电子束沉积具有厚度为100 nm或更小的悬臂， 100 nm或更小的宽度将使用来自材料的离子束以 传统悬臂的末端，产生具有 小的高性能悬臂在较大的一个自由端。类似 采用电子束沉积塑料制作复合材料悬臂梁 就像小杠杆形状的纳米结构。除此之外， 这些新的杠杆将允许更快的扫描，增加时间 力测量的分辨率，通过减少 悬臂噪音，并通过减少悬臂弹簧提高灵敏度 常数为了使用这些新的杠杆，我们建议构建一个AFM头 具有适当的光学器件，可与非常小的悬臂和位置传感器配合使用 数据采集系统的检测带宽至少为100 MHz。 该探测器将用于表征新的 杠杆。此外，我们还将测试新杠杆的性能 在静电绘图实验中，我们期望提高灵敏度， 双层融合实验中，我们希望发现新的动力学脂质 融合过程中的重组