Using the Ionic Liquid Ion Sources for Focused Ion Beam applications: Investigating the fundamentals

使用离子液体离子源进行聚焦离子束应用：研究基本原理

• 批准号: 2750303
• 金额: --
• 依托单位: University of Southampton
• 依托单位国家: 英国
• 项目类别: Studentship
• 财政年份: 2022
• 资助国家: 英国
• 起止时间: 2022 至 无数据
• 项目状态: 未结题
• 来源: https://gtr.ukri.org/projects?ref=studentship-2750303
• 关键词: Using; Ionic; Liquid; Ion; Sources

Gallium Liquid Metal Ion Sources (LMIS) are the standard choice for ion beam material etching, facilitating ion beam lithography as the go-to technique for in situ microfabrication. Many microfabrication applications would benefit from a more flexible ion beam source, with different ion beam species significantly influencing the physical and chemical nature of the milling results, for example reducing ion implantation or enhancing etching through using chemically reactive ions.One such option is Ionic Liquid Ion Sources (ILIS), where rather than extracting ions from a liquid metal such as gallium, ions can be extracted from an ionic liquid. Through the use of Ionic Liquids, there is a far greater choice of ion type that can be emitted, across a much larger range.Recently there have been great improvement in the operation of ILIS's through the development of their use for ion thrusters for spacecraft. Our research group at Southampton has developed an electrospray ion thruster for micro spacecraft propulsion. This project will develop this thruster for application as an ILIS for Focused Ion Beam etching of materials. The PhD will investigate the fundamentals of ion emission from an Ionic Liquid Ion Source, investigating the properties of the beam using various diagnostic techniques, and the excellent facilities at the David Fearn Electric Propulsion Laboratory. Particular emphasis will be put on gaining insight into the ion emission process, the use of novel ion liquids, and the imaging of the ion emission source.The PhD is part of a large EPSRC funded project, in collaboration with the Optoelectronics Research Centre (Dr Oleg Buchnev);https://gow.epsrc.ukri.org/NGBOViewGrant.aspx?GrantRef=EP/V04995X/1 The PhD is part sponsored by Thermo Fisher Scientific, one of the world leaders in the development of focused ion beam technology. The PhD student will be working closely with their primary FIB R&D team.For more information please contact Dr Charlie Ryan, Lecturer in Astronautics, University of Southampton, [e-mail].

镓液态金属离子源（LMIS）是离子束材料蚀刻的标准选择，促进了离子束光刻作为原位微加工的首选技术。许多微加工应用将受益于更灵活的离子束源，不同的离子束种类会显著影响铣削结果的物理和化学性质，例如通过使用化学反应性离子减少离子注入或增强蚀刻。其中一种选择是离子液体离子源（ILIS），它不是从液态金属（如镓）中提取离子，而是从离子液体中提取离子。通过使用离子液体，可以在更大的范围内发射更多的离子类型。最近，通过发展离子推进器在航天器上的应用，ILIS的操作有了很大的改进。我们在南安普顿的研究小组开发了一种用于微型航天器推进的电喷雾离子推进器。本项目将开发该推力器作为聚焦离子束蚀刻材料的ILIS应用。博士将研究离子液体离子源离子发射的基本原理，使用各种诊断技术研究光束的特性，以及David Fearn电力推进实验室的优秀设施。特别的重点将放在深入了解离子发射过程，使用新的离子液体，以及离子发射源的成像。博士学位是EPSRC与光电子研究中心（Oleg Buchnev博士）合作资助的一个大型项目的一部分；https://gow.epsrc.ukri.org/NGBOViewGrant.aspx?GrantRef=EP/V04995X/1博士学位部分由赛默飞世尔科学公司赞助，赛默飞世尔是世界领先的聚焦离子束技术开发公司之一。博士生将与他们的主要FIB研发团队密切合作。欲了解更多信息，请联系南安普顿大学航天讲师Charlie Ryan博士，邮箱：[e-mail]。