Integrated on-chip force and displacement sensors for high-speed atomic force microscopy of ultimate sensitivity

用于具有终极灵敏度的高速原子力显微镜的集成片上力和位移传感器

• 批准号: LP130100185
• 负责人: A/Prof Mariusz Martyniuk
• 金额: $ 14.2万
• 依托单位: The University of Western Australia
• 依托单位国家: 澳大利亚
• 项目类别: Linkage Projects
• 财政年份: 2013
• 资助国家: 澳大利亚
• 起止时间: 2013-07-01 至 2015-12-31
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/LP130100185
• 关键词: Integrated; chip; force; displacement; sensors

This project aims to develop next generation atomic force microscopy systems based on a novel interferometric method for on-chip force and displacement sensing. The proposed sensitivity improvement of two orders of magnitude over the present state-of-the-art will provide a disruptive innovation for various present and future nanotechnologies.

该项目旨在开发下一代原子力显微镜系统的基础上，一种新的干涉方法的芯片上的力和位移传感。所提出的灵敏度比现有技术提高两个数量级，将为各种现有和未来的纳米技术提供颠覆性的创新。