Advanced Maskless Photolitography for Western Australia

西澳大利亚先进无掩模光刻技术

• 批准号: LE210100126
• 负责人: A/Prof Mariusz Martyniuk
• 金额: $ 35.18万
• 依托单位: The University of Western Australia
• 依托单位国家: 澳大利亚
• 项目类别: Linkage Infrastructure, Equipment and Facilities
• 财政年份: 2021
• 资助国家: 澳大利亚
• 起止时间: 2021-07-02 至 2022-07-01
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/LE210100126
• 关键词: Advanced; Maskless; Photolitography; Western; Australia

This project aims to close an existing gap in micro- & nano-fabrication in Western Australia and provide access to advanced maskless photolithography in support of Australian research flagships of international excellence which include advanced infrared and quantum technologies, semiconductor optoelectronics, chemical engineering, microelectromechanical systems, as well as dark matter and gravitational wave discovery. Notably, the new capability is of utmost importance for five distinct ARC Centres in multidisciplinary areas and will be available to all researchers via the WA Node of Australian National Fabrication Facility in support of high impact scientific research and to maintain strong engagement with industry and Australian economy.

该项目旨在缩小西澳大利亚在微纳米制造方面的现有差距，并提供先进的无掩膜光刻技术，以支持澳大利亚的国际卓越研究旗舰，包括先进的红外和量子技术，半导体光电子学，化学工程，微机电系统，以及暗物质和引力波的发现。值得注意的是，新的能力对于五个不同的ARC中心在多学科领域至关重要，并将通过澳大利亚国家制造设施的WA节点提供给所有研究人员，以支持高影响力的科学研究，并保持与工业和澳大利亚经济的紧密联系。