System integration of polymer MEMS and organic semiconductors for the fabrication of sensors and actuators

用于制造传感器和执行器的聚合物 MEMS 和有机半导体的系统集成

• 批准号: 327366-2006
• 负责人: Izquierdo, Ricardo
• 金额: $ 1.31万
• 依托单位: Université du Québec à Montréal
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2008
• 资助国家: 加拿大
• 起止时间: 2008-01-01 至 2009-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=397739
• 关键词: System; integration; polymer; MEMS; organic

Polymers offer a lot of advantages for microsensors and microactuators and they are considered as one of the most promising materials for biochips, micro optics and microfluidic devices. Polymer based nano and micro devices are flexible, chemically and biologically compatible, available in many varieties and can be fabricated in really 3-D shapes. They are relatively low-cost materials and fabrication techniques are simple. There is no need for special clean-room and/or high temperature processes. Polymers can be deposited on various types of substrates, and there is a wide choice of molecular structures. This enables films to be produced with various physical and chemical properties including sensing and actuation behaviour. On another side, active devices such as, light emitting diodes (OLED), thin film transistors (OTFT), photodetectors and phototransistors can be build from organic semiconductors. Organic semiconductors can be then implemented in a variety of different applications in microelectronics and optoelectronics. To build fully functional microsystems, the necessary electronics have to be integrated. Even though polymer MEMS and organic semiconductors have several common features, and that important efforts were devoted in the past to independently develop each of those two technologies, up to now, little effort have been devoted to integrate them. Different approaches to build polymers MEMS will be studied. We will use parallel microfabrication techniques such as subtractive methods using lithography and sacrificial layers. We will also use micro imprint lithography and micromolding which are very promising techniques in the area of polymer MEMS. Direct writing methods which allow much more flexibility in prototype development will also be used. Among those techniques, microstereolithography and 3-D ink jet printing are particularly suitable for processing polymers and will be intensively explored. The organic semiconductors that we will use will be from both families, small molecules and polymers. Alternative methods for processing those materials in combination with the polymers used for building the MEMS structure will be developed.

聚合物为微传感器和微执行器提供了许多优势，被认为是生物芯片、微光学和微流体设备最有前途的材料之一。基于聚合物的纳米和微米器件非常灵活，具有化学和生物相容性，有多种类型，并且可以制造成真正的 3D 形状。它们是相对低成本的材料并且制造技术简单。不需要特殊的洁净室和/或高温工艺。聚合物可以沉积在各种类型的基材上，并且分子结构有多种选择。这使得能够生产出具有各种物理和化学特性的薄膜，包括传感和驱动行为。另一方面，有源器件，例如发光二极管（OLED）、薄膜晶体管（OTFT）、光电探测器和光电晶体管可以由有机半导体构建。有机半导体可以应用于微电子和光电子领域的各种不同应用。为了构建功能齐全的微系统，必须集成必要的电子设备。尽管聚合物MEMS和有机半导体有几个共同的特点，并且过去为独立开发这两种技术付出了巨大的努力，但到目前为止，在整合它们方面付出的努力还很少。我们将研究构建聚合物 MEMS 的不同方法。我们将使用并行微加工技术，例如使用光刻和牺牲层的减材方法。我们还将使用微压印光刻和微成型，这些技术在聚合物 MEMS 领域非常有前途。还将使用直接编写方法，使原型开发更加灵活。在这些技术中，微立体光刻和3D喷墨打印特别适合加工聚合物，并将得到深入探索。我们将使用的有机半导体来自小分子和聚合物家族。将开发与用于构建 MEMS 结构的聚合物结合处理这些材料的替代方法。