Scanning vibrometer for 3D MEMS dynamic characterization

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This proposal request funding for purchasing of Laser Doppler Vibrometry (LDV) system that has the capability of characterizing the 3D Micro/NANO Electro Mechanical Systems (MEMS/NEMS) dynamics at high frequency. Several research projects in our group and the University of Alberta will utilize the requested equipments including, dynamic characterization of energy harvesting MEMS/NEMS based devices using ambient vibrations surrounding an aging biomedical, and mechanical, aerospace, civil or environmental system. Our group is involved in a number of other projects that include MEMS/NEMS actuators at high resonance frequency, such as structurally modified Radio Frequency switch toward the reduction of skin effect at high frequency (20 MHz). Laser Doppler Vibrometry is a widely accepted tool for dynamic characterization of MEMS/NEMS. Using automated scan capability, LDV can measure structural resonance and display out-of-plane deflection shapes with amplitudes down to the picometer level and frequencies to 30 MHz. This LDV is presently being used throughout the MEMS/NEMS community to characterize the dynamics of micro-devices such as optical switches, vibrating cantilevers, membranes, actuators, motors, micro-optics and torsional oscillators. Applications for Laser Vibrometry measurements include: (1) Dynamic testing of device response to determine mechanical parameters such as resonant frequency, stiffness and damping, (2) Characterization of device response during design development and release processes, (3) Validate design performance versus expected FEA model predictions, (4) Determine reliability under mechanical excitation (wire bonding, environmental vibration and shock), radiation, temperature, humidity and pressure stress by targeting device inside environmental or vacuum chamber and (5) Calibrate actuator and sensor displacements versus drive voltage over wide range of movements down to nano meter scale.