Development of micro abrasive water jetting technology for micro machining and polishing on small complex curved surfaces.

微小复杂曲面微细加工与抛光微磨料水射流技术的发展。集成传感器和微执行器等微器件的制造是微电子工业快速发展的新挑战。许多现有的技术要么发现限制或导致加工表面上的缺陷。本项目将开发一种用于微加工和抛光的创新磨料水喷射技术。它将为行业的进一步发展开发基础和原型。新的喷嘴设计将分析和优化计算流体动力学研究和实验研究，使用粒子图像测速仪。还将开发用于过程控制的加工性能的数学模型。

Development of micro abrasive water jetting technology for micro machining and polishing on small complex curved surfaces. The fabrication of micro-parts such as those used in integrated sensors and micro-actuators is a new challenge for the rapid development of this industry. Many existing technologies either find limitations or result in defects on the machined surfaces. This project will develop an innovative abrasive water-jetting technology for micro machining and polishing. It will develop the fundamentals and prototype for further development by industry. New nozzle designs will be analyzed and optimized by computational fluid dynamics studies and experimental investigations using a Particle Image Velocimeter. Mathematical models for the processing performance will also be developed for use in process control.