Alternate technology for miniature gyroscope

在压力传感器和加速度计成功商业化之后，用于角速度测量的陀螺仪有望成为微电子机械系统(MEMS)技术最重要的传感应用。除了光学陀螺仪之外，所有传统的陀螺仪都是通过检测作用于旋转或振动防止质量块上的科里奥利加速度来工作的。这项技术在过去20年中已经成熟，商业MEMS陀螺仪现在可以从多个供应商获得。不幸的是，这些微型陀螺仪的精密机械结构在受到高冲击或振动时仍然容易失效。振动运动中的小粒子和防振动质量具有相同的科里奥利加速度。这些粒子可以是电子、气体分子、离子、喷墨液滴或来自电喷的带电液滴。用这些运动粒子代替防振质量来测量角速度，可以极大地提高设备的可靠性和稳健性。

The gyroscope for angular rate measurement is expected to be the most significant sensory application of the Microelectromechanical Systems (MEMS) technology after the successful commercialization of pressure sensors and accelerometers. With the exception of optical gyroscopes, all traditional gyroscopes operate by detecting the Coriolis acceleration acting on a rotating or vibrating proof mass. This technology has matured in the last two decades and commercial MEMS gyroscopes are now available from multiple venders. Unfortunately the delicate mechanical structures of these miniature gyroscopes are still prone to fail when subjected to high shock or vibration. Small particles in oscillatory motions and a vibrating proof mass experience the same Coriolis acceleration. These particles could be electrons, gas molecules, ions, inkjet droplets or charged droplets from electro spraying. Using these moving particles to measure angular rate in place of a vibrating proof mass could greatly improve device reliability and robustness.