Alternate technology for miniature gyroscope

用于角速率测量的陀螺仪有望成为继压力传感器和加速度计成功商业化之后微机电系统（MEMS）技术最重要的传感应用。除了光学陀螺仪之外，所有传统的陀螺仪都通过检测作用在旋转或振动的检验质量上的科里奥利加速度来操作。这项技术在过去二十年中已经成熟，现在可以从多个供应商获得商用MEMS陀螺仪。不幸的是，这些微型陀螺仪的精密机械结构在受到高冲击或振动时仍然容易失效。振荡运动中的小颗粒和振动的检验质量经历相同的科里奥利加速度。这些粒子可以是电子、气体分子、离子、喷墨液滴或来自电喷雾的带电液滴。使用这些移动的粒子来代替振动的检测质量来测量角速率可以大大提高设备的可靠性和鲁棒性。 拟议的5年研究计划将探索角速率测量的原始技术，而不使用脆弱的振动验证质量。虽然这项新技术永远不会取代成熟的振动质量惯性传感技术，但它可以提供额外的功能，如鲁棒性和准确性，以补充现有的惯性传感器技术。

The gyroscope for angular rate measurement is expected to be the most significant sensory application of the Microelectromechanical Systems (MEMS) technology after the successful commercialization of pressure sensors and accelerometers. With the exception of optical gyroscopes, all traditional gyroscopes operate by detecting the Coriolis acceleration acting on a rotating or vibrating proof mass. This technology has matured in the last two decades and commercial MEMS gyroscopes are now available from multiple venders. Unfortunately the delicate mechanical structures of these miniature gyroscopes are still prone to fail when subjected to high shock or vibration. Small particles in oscillatory motions and a vibrating proof mass experience the same Coriolis acceleration. These particles could be electrons, gas molecules, ions, inkjet droplets or charged droplets from electro spraying. Using these moving particles to measure angular rate in place of a vibrating proof mass could greatly improve device reliability and robustness. The proposed 5-year research program will explore original techniques for angular rate measurement without using a fragile vibrating proof mass. Although this new technology will never replace the mature vibrating mass inertial sensing technology that produces very low-cost MEMS gyroscopes in volume, it can provide additional capabilities such as robustness and accuracy to supplement existing inertial sensor technology.