Alternate technology for miniature gyroscope

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The gyroscope for angular rate measurement is expected to be the most significant sensory application of the Microelectromechanical Systems (MEMS) technology after the successful commercialization of pressure sensors and accelerometers. With the exception of optical gyroscopes, all traditional gyroscopes operate by detecting the Coriolis acceleration acting on a rotating or vibrating proof mass. This technology has matured in the last two decades and commercial MEMS gyroscopes are now available from multiple venders. Unfortunately the delicate mechanical structures of these miniature gyroscopes are still prone to fail when subjected to high shock or vibration. Small particles in oscillatory motions and a vibrating proof mass experience the same Coriolis acceleration. These particles could be electrons, gas molecules, ions, inkjet droplets or charged droplets from electro spraying. Using these moving particles to measure angular rate in place of a vibrating proof mass could greatly improve device reliability and robustness. The proposed 5-year research program will explore original techniques for angular rate measurement without using a fragile vibrating proof mass. Although this new technology will never replace the mature vibrating mass inertial sensing technology that produces very low-cost MEMS gyroscopes in volume, it can provide additional capabilities such as robustness and accuracy to supplement existing inertial sensor technology.