Accurate and efficient models for microscopic transport processes in gases

气体微观传输过程的准确高效模型

• 批准号: 239199-2011
• 负责人: Struchtrup, Henning
• 金额: $ 3.57万
• 依托单位: University of Victoria
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2014
• 资助国家: 加拿大
• 起止时间: 2014-01-01 至 2015-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=547237
• 关键词: Accurate; efficient; models; microscopic; transport

Advanced microfabrication techniques allow to design and build devices on the micro and nanometer scale, e.g., micro sensors and other micro-electro-mechanical systems (MEMS). Computer simulations of the processes in microdevices are extremely useful for the prediction of device behavior, and for optimization of design performance. Indeed, good simulation models allow to reduce the amount of (costly!) prototyping, moreover they give detailed insight into the processes in the device, which are not accessible to measurements.

先进的微细加工技术允许设计和制造微米和纳米尺度的器件，例如，微传感器和其他微机电系统（MEMS）。微器件工艺过程的计算机模拟对于器件行为的预测和设计性能的优化是非常有用的。事实上，良好的模拟模型可以减少（昂贵的！）此外，它们还提供了对设备中的过程的详细了解，这些过程是测量无法访问的。